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Mobile Loadlock Chamber with sputtering & sample transfer

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Mobile Loadlock Chamber with sputtering & sample transfer

  • Client

    NUS

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Function: Loadlock chamber for PLD with below:

  1. Mobile on wheels
  2. Sputtering magnetron
  3. Sample transfer arm with rotation and lift
  4. Dry scroll backing pump
  5. Turbo pump
  6. Vacuum Gauge
  7. Gate Valves
  8. Mass Flow Controllers