The DST3, Triple Target Sputter Coater, is equipped with a large chamber (300 mm diameter) and three 2” diameter water-cooled cathodes which make it suitable for long time deposition. The desk magnetron coater is equipped with RF and DC power supplies. It can sputter semiconductors, dielectrics and metal (oxidizing & noble) targets (Deposition Table). The Confocal Sputter Coater is equipped with an auto adjustable matching box, minimizing the reflected power in the RF Sputtering.

For increasing film adhesion to the substrate and to improve the film structures, a 300 V, DC bias voltage can be applied to the substrate (optional).

According to state of the cathodes, DST3 is available in two models:

DST3-A (Angled Cathodes):
The DST3-A is equipped with three angled cathodes with a common focal point. It can sputter from two or three (optional) targets simultaneously or independently to form alloys or multilayer deposition respectively. The maximum size of substrates in this model could be 3”.

DST3-S (Straight Cathodes):
The DST3-S with three straight cathodes is suitable for sputtering a single large specimen with diameter up to 20 Cm or several small specimens.

Model: DST3
Product Type: PVD

Brand: VacCoat