Brand: Edwards
iGX
$0.00
The Edwards iGX Dry Pumps provide a versatile vacuum pump platform with reliable performance for clean to medium-duty silicon and compound semiconductor applications. Compact size and low vibration allow great flexibility as iGX pumps can be used for on-tool, proximity or remote installations – in turn, ensuring space savings and ultimately reduced overall cost of ownership. The iGX pumps also offer Ethernet connectivity and other networking options.
Model: IGX
Product Type: Semi Dry
Pump Speed Selection: 100-600 m3/hr
Ultimate Vacuum: 0.005
Brand: Edwards
Description
Technical Specs
Technical Specs
| iGX100 | iGX600 | |
| Peak speed | 105 m3h-1 | 620 m3h-1 |
| Ultimate pressure | <5.0E-3 mbar | <7.0E-3 mbar |
| Inlet connection | ISO 63 | ISO 100 |
| Outlet connection | NW 25 | NW 25 |
| Weight | 120 kg | 220 kg |
| Noise at ultimate | < 55 dB(A) |
Benefits
Benefits
Lower Utilities Costs
Typically a 40% saving can be made on utilities costs over an entire fab.
Designed for Energy Efficiency
High performance motors and inverter drives. Low operating power consumption
Unique pumping mechanism from atmosphere to 10E-6 mbar
Able to operate continuously at all inlet pressures. No separate “rough pumping” required.
Lower power standby mode Minimizes gas usage
Nitrogen dilution can be tuned to the application requirement
Low noise and vibration
Downloads
Downloads
 Gix Brochure |