Brand: Edwards
iXH
$0.00
The iXH dry pump range sets new standards for harsh process capability, reliability and lower cost of ownership.
The iXH dry pump range is an evoluti on of our market leading iH products and sets new standards for harsh process capability, reliability and lower cost of ownership. With a modular design, iXH pumps meet today’s process requirements and have road-mapped responses to emerging application challenges in high-k, low-k, SACVD, LPCVD, ALD, TCO, GaN and EPI.
Model: iXH
Product Type:Semi Dry
Pump Speed Selection: 100-2750 m3/hr
Ultimate Vacuum: 0.005
Brand: Edwards
Description
Technical Specs
Technical Specs
| iXH100 | iXH 610 | iXH 1210 | iXH 1820 | iXH 3030 | |
| Peak speed | 105 m3h-1 | 665 m3h-1 | 620 m3h-1 | 620 m3h-1 | 620 m3h-1 |
| Ultimate pressure | 2.0E-3 mbar | 4.93E-3 mbar | 4.93E-3 mbar | 4.93E-3 mbar | 4.93E-3 mbar |
| Inlet connection | ISO 63 | ISO 100 | ISO 100 | ISO 160 | ISO 160 |
| Outlet connection | NW 40 | NW 40 | NW 40 | NW 40 | NW 40 |
| Weight | 260 kg | 355 kg | 413 kg | 471 kg | 619 kg |
Benefits
Benefits
More process capability
Greatly increased powder handling capability
Wide temperature range
Allows optimization of pump to minimise by-product accumulation from condensation.
Innovative pump seal technology
Lengthen process life and reduce leakage risks
Smaller footprint and lower height
Ease of fitting in any fab
