In stock
Brand: UHV Transfer
Loadlock Transfer
$0.00
UHV Transfer Loadlock Transfer: These high-vacuum compatible loadlocks are designed to load wafers or other substrates into a SEMI-MESC compatible or custom process modules.
Using unique magnetically coupled transfer devices, wafers can be repeatedly loaded and removed without breaking vacuum.
Along with the standard product lines shown, UHV Transfer can make modifications to standard products or design completely custom systems to meet specific customer needs.
Model: Loadlock Transfer
Product Type: Sample Transfer
Brand: UHV Transfer
Description
Technical Specs
Technical Specs
| MODEL | Mascot 200 | Carousel-200 | NW40 Loadlock |
| Chamber | Machined aluminum block – HV compatible Metal with Viton O-rings | Machined aluminum block – HV compatible Metal with Viton O-rings | 6061 aluminum, custom 4-way cross |
| Transfer System | All HV Compatible | All HV Compatible | Thru front door |
| Substrate sizes | Up to 200mm | Up to 200mm | 1” |
| No of Samples | 1 | Up to 25 samples | 1 |
| Footprint | 14″ x 11.5″ x 4″ | 24.8 inches x 26 inches | Depends |
| Volume | 3.89L | Main chamber – 22 Liters Main chamber – 23 Liters Main chamber – 13 Liters |
Depends |
| Pump port | ISO NW 100 | ISO NW40 | NW40 |
Benefits
Benefits
- Single substrate
- Can load up to 25 wafers
- Up to 200mm wafer
Downloads
Downloads
 Loadlock transfer brochure |