In stock
Brand: Horiba
SEC-Z500X
$0.00
Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X is HORIBA’s best selling model for digital mass flow controllers. It has multi-range/multi-gas functions enabling users to change the type of gas or full-scale flow rate on-site quickly and easily. With high accuracy +/- 1.0% S.P, piezo actuator valve, high speed response and being all-metal this mass flow controller is suitable for process yield improvement and simplified parts management.
Model: SEC-Z500X
Product Type: Mass Flow Controller
Brand: Horiba
Description
Technical Specs
Technical Specs
| 1 | Full-scale flow rate | 0.5 SCCM – 200 SLM |
| 2 | Flow rate control range | 2%~100% |
| 3 | Flow rate measuring range | 0~100% |
| 4 | Response time | < 1s |
| 5 | Accuracy | ±1.0% S.P. (Flow rate > 25% F.S.)
±0.25% F.S. (Flow rate ≤ 25% F.S.) |
Benefits
Benefits
- High Accuracy ±1.0% S.P.
- This mass flow controller’s linearity is compensated by a polynomial approximated curve and achieves high accuracy for all flow control ranges.
- High Speed Response
- Multi-Gas/Multi-Range Solution
- The configuration software makes it possible to change specifications quickly and easily. One key feature is the changes can be made without removing the mass flow controller from the gas panel or piping.
Downloads
Downloads
 Brochure SEC Z500 |