In stock
Brand: Gencoa
Speedflo
$0.00
Speedflo’s technology is continuously being developed, pushing the operating window and helping end-users to get even more from the process. It allows you to perfect your reactive sputtering processes with Speedflo, an advanced reactive feedback control system delivering improvements to deposition rates, coating properties and process reliability.
Model: Speedflo
Product Type: Process Control
Brand: Gencoa
Description
Technical Specs
Technical Specs
| No of channels | 8 |
| Processes | Reactive Sputtering, PE-CVD, e-beam deposition |
| Auto Tune | Yes |
| Sensor options | Target voltage, PEM in-situ, PEM ex-situ (Penning) and Optix, or Lambda for O² only |
Benefits
Benefits
- Improved deposition rates (2-3x compared to open loop)
- Patented autotuner for optimum control parameters
- Enhanced uniformity by multi-zone sensing and gas control
- Wide range of sensor configurations
- Advanced user interface and simulation software for controller training
- Process tuning and design service available
