UHV Transfer Vacuum Suitcase: The Vacuum Suitcase system is intended for in-vacuum sample transportation between multiple measurement and fabrication stations. The suitcase is a complete autonomous system mounted on a mobile cart with vertical adjustability for multiple sample transfer heights. It includes a storage chamber, buffer (interstitial) chamber, sample transporter, valves, pumps and gauges with the respective controllers and power supplies.

The substrates are loaded one at a time from a loadlock into a cassette. Once loaded, the motorized elevator positions the cassette to allow a manual transfer arm to pick up any one of the substrates and deliver it into whichever process or analysis chamber the system is attached

Models: Vacuum Suitcase
Product Type: Sample Transfer

Brand: UHV Transfer