In stock
Brand: Edwards
PRA
$0.00
The Edwards RGAs are quadrupole mass spectrometers with a high performance analyser tube consisting of the ion source, the quadrupole filter and the detector.
Dependent on the weight or mass of the molecules, the RGA shows the composition of the gas in the system/chamber/process.
Model: PRA
Product Type: Residual Gas Analysis
Brand: Edwards
Description
Technical Specs
Technical Specs
| PRA100 | PRA100S | PRA200 | PRA200S | |
| Mass range (amu) | 1-100 | 1-100 | 1-200 | 1-200 |
| Sensitivity (A/mbar) | 1x10E-5 | 400/1x10E-5 | 1×10-5 | 400/1x10E-5 |
| Minimum Detectable partial pressure (mbar) | 1x10E-10 | 1x10E-14/1x10E-10 | 1x10E-10 | 1x10E-14/1x10E-10 |
| Max operating pressure (mbar) | 1x10E-4 | 1x10E-4 | 1x10E-4 | 1x10E-4 |
| Filament Material | Ir/Y2O3 | Ir/Y2O3 | Ir/Y2O3 | Ir/Y2O3 |
Benefits
Benefits
- Total pressure measurement for full process control
- Dual filament for highest reliability and up-time
- On unit display for basic measurements without a PC
- Customer replaceable parts
- Protection of Ion source and EM
